Canon MPA 600FA - Mirror Projection Mask Aligner
1X Mirror Projection
Auto Feeder: Single or double, cassette to cassette, backside wafer handling
Wafer Sizes: 4”, 5”, 6”
Mask Sizes: 5”, 6”, 7”
Resolution: 1.5 um (using positive resist)
Illumination: 2kw high pressure mercury lamp
Wavelengths used: 365nm(i-line) 405nm(h-line) 436nm(g-line)
Intensity: (@ 1800watts power output) 4”wafer-more than 700mw, 5”wafer-more than 650mw, 6”wafer-more than 600mw
Intensity / Exposure Uniformity: within +-3%
Constant Temperature Control – monitors and controls system temp. within +-.3 degrees C.
Automatic Alignment: HeNe (633nm) Laser Beam Scanning
Alignment Modes: Spot Beam / Sheet Beam
Accuracy: 3sigma <=.54um
MPA-600FA: 200 VAC, 3Phase, 6 kVA, 50/60Hz
Air Supply(CTC): 200 VAC, 3Phase, 8 kVA, 50/60Hz
CDA(Clean Dry Air)Pressure: minimum 6.5 kg/cm2 , flow rate 130 lit/min
Vacum: 50 cmHg or moreSelling "AS IS, WHERE IS." We do not have the capability to test this equipment. System was de-installed in working operational condition. All returns must comply with stated Return Policy. Please continue:
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TAXES & FEES:
California Sales Tax applies if order within California at 8%. Handling charges may apply. Your cost is the price of your item, shipping/handling charge, insurance, and sales tax if applicable.
REFUNDS & RETURNS:
No returns after 14 days. Returns must have good reason for return, i.e. defective items, missing items, or items not described accurately. Returned items must be in same condition as shipped for refund. PLEASE Contact before leaving Negative Feedback in the seller...