Venetian mirrors Mirror

Canon MPA 600FA - Mirror Projection Aligner

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$200,000.00 Buy It Now
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  • MPN:
    MPA 600A
  • UPC:
    Does not apply

Canon MPA 600FA - Mirror Projection Mask Aligner

1X  Mirror Projection

Auto Feeder: Single or double, cassette to cassette, backside wafer handling

Wafer Sizes:   4”, 5”, 6”

Mask Sizes:   5”, 6”, 7”

Resolution:  1.5 um  (using positive resist)

Illumination: 2kw high pressure mercury lamp

Wavelengths used: 365nm(i-line)  405nm(h-line)  436nm(g-line)

Intensity: (@ 1800watts power output)  4”wafer-more than 700mw,    5”wafer-more than 650mw,   6”wafer-more than 600mw

Intensity / Exposure Uniformity:  within +-3%

Constant Temperature Control – monitors and controls system temp. within +-.3 degrees C.

Automatic Alignment:  HeNe (633nm)  Laser Beam Scanning

Alignment Modes: Spot Beam / Sheet Beam

Accuracy: 3sigma <=.54um

MPA-600FA: 200 VAC, 3Phase, 6 kVA, 50/60Hz

Air Supply(CTC): 200 VAC, 3Phase, 8 kVA, 50/60Hz

CDA(Clean Dry Air)Pressure: minimum 6.5 kg/cm2  ,    flow rate  130 lit/min

Vacum: 50 cmHg or more

Selling "AS IS, WHERE IS." We do not have the capability to test this equipment. System was de-installed in working operational condition. All returns must comply with stated Return Policy. Please continue:


We accept Paypal, Company Check, Wire Transfers. For further information please call (805) 895-7767.


California Sales Tax applies if order within California at 8%. Handling charges may apply.  Your cost is the price of your item, shipping/handling charge,  insurance, and sales tax if applicable.  


No returns after 14 days. Returns must have good reason for return, i.e. defective items, missing items, or items not described accurately. Returned items must be in same condition as shipped for refund. PLEASE Contact before leaving Negative Feedback in the seller...

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